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Articles
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with Citations
to Z. Abou-Assaleh |
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1992 |
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Sidney Luther Gulick, Ph.D. dissertation.
Université du
Québec, Institut National de la recherche Scientifique, (INRS - Énergie et
Matériaux), Varennes, Québec, Canada, 1992. |
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"UNE
MESURE DE LA FONCTION DE DISTRIBUTION DE VITESSES IONIQUES DANS LA PREGAINE D'UN
PLASMA PAR LA FLUORESCENCE INDUITE PAR LASER" |
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1992 |
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J A Meyer et al 1992 Plasma
Sources Sci. Technol. 1 147-150
Measurements of the
presheath in an electron cyclotron resonance etching device
J A Meyer,
G -H Kim,
M J Goeckner
and
N Hershkowitz
Eng. Res. Center for Plasma-Aided Manuf., Wisconsin Univ.,
Madison, WI, USA
Print publication: Issue 3 (August 1992)
Abstract. The first
direct measurement of a collisional Bohm presheath from
plasma potential measurements is given. By measuring the
presheath thickness in front of a grounded wafer stage, a
determination of the collision mean free path for ions in an
electron cyclotron resonance etching tool has been made.
Presheaths were measured in N2 and CF4
plasma using an emissive probe. The presheath thickness in N2
was found to be linearly dependent on the mean free path.
Measurements of CF4 plasmas, for which the
collision cross sections are unknown, have shown results
similar to those found for nitrogen. This result has enabled
an extrapolation to be made of the effective cross section
for collisions in plasmas created from CF4.
doi:10.1088/0963-0252/1/3/001
URL: http://stacks.iop.org/0963-0252/1/147
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http://www.utdallas.edu/~goeckner/publications/PSST1p147_1992.pdf |
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1992 |
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http://www.fluidmal.uma.es/pdfs/PFB_1992.pdf |
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Physics of Fluids B: Plasma Physics -- November 1992 -- Volume
4, Issue 11, pp. 3579-3585 |
Self-consistent, nonlocal electron
heat flux at arbitrary ion charge number
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Juan R. Sanmartín
and
J. Ramírez
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E.T.S.I. Aeronáuticos, Universidad Politécnica, 28040 Madrid,
Spain
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R. Fernández-Feria
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E.T.S.I. Industriales, Universidad de Sevilla, 41012 Sevilla,
Spain
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F. Minotti
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Laboratorio de Física del Plasma, Universidad de Buenos Aires,
1428 Buenos Aires, Argentina
(Received 13 March
1992; accepted 1 July 1992)
A single,
nonlocal expression for the electron heat flux, which closely
reproduces known results at high and low ion charge number
Z, and ``exact'' results for the local limit at all
Z, is derived by solving the kinetic equation in a
narrow, tail-energy range. The solution involves asymptotic
expansions of Bessel functions of large argument, and
(Z-dependent) order above or below it, corresponding
to the possible parabolic or hyperbolic character of
the kinetic equation; velocity space diffusion in
self-scattering is treated similarly to isotropic
thermalization of tail energies in large Z
analyses. The scale length H characterizing nonlocal effects
varies with Z, suggesting an equal dependence of any
ad hoc flux limiter. The model is valid for all H
above the
mean-free path for thermal electrons. Physics of Fluids B:
Plasma Physics is copyrighted by The American Institute of
Physics.
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Self-consistent, nonlocal electron
heat flux at arbitrary ion charge number |
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Self-consistent, nonlocal electron
heat flux at arbitrary ion charge number |
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1992 |
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Review of Scientific Instruments -- January 1992 -- Volume 63,
Issue 1, pp. 31-36 |
Validating cylindrical Langmuir
probe techniques
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J. H. Rogers,
J. S. De Groot,
and
D. Q. Hwang
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University of California Davis and Lawrence Livermore National
Laboratory, L-794 Livermore, California 94550
(Received 1 July 1991;
accepted 16 September 1991)
Several
methods for estimating the plasma potential and density using
cylindrical Langmuir probes are compared to the
self-consistent solutions of the
Vlasov–Poisson equations calculated by Laframboise (J. G.
Laframboise, Ph. D. dissertation, University of
Toronto, 1966). Measurements are made during the
decay of a magnetic-field-free plasma in which the mean-free
path of the electron is shorter than the dimensions
of the vacuum vessel (the electrons, therefore, have
a Maxwellian velocity distribution). The measurements
are made in a parameter range in which exact
analytical solutions do not exist for the ion and
electron saturation currents, 0.5 R/ De5,
where R is the probe radius and
De
is the electron Debye length (kTe/4 ne2)1/2.
An iterative procedure is used to fit the data at
probe voltages both above and below the plasma
potential while constraining the curves to be
continuous at the plasma potential. The measured
curves could be represented extremely well by the numerical
results. It is therefore assumed that the plasma
parameters used to fit the numerical results to the
measurements are correct. The systematic errors which
result from using several analysis techniques which
assume R/De 1
are also presented, and it is shown that empirical
corrections to these errors can be described which compensate
for the finite probe radius. Review of Scientific
Instruments is copyrighted by The American Institute of Physics.
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Validating cylindrical Langmuir
probe techniques |
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Validating cylindrical Langmuir
probe techniques |
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Articles
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Dissertation |
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with Citations to |
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Z. Abou-Assaleh |
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Theoretical Plasma
Physics |
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&
Controlled Thermonuclear Fusion Energy |
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